JPS54160294A - Extraneous matter detector - Google Patents

Extraneous matter detector

Info

Publication number
JPS54160294A
JPS54160294A JP6940278A JP6940278A JPS54160294A JP S54160294 A JPS54160294 A JP S54160294A JP 6940278 A JP6940278 A JP 6940278A JP 6940278 A JP6940278 A JP 6940278A JP S54160294 A JPS54160294 A JP S54160294A
Authority
JP
Japan
Prior art keywords
extraneous matter
matter detector
detector
extraneous
matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6940278A
Other languages
Japanese (ja)
Inventor
Shirou Noguchi
Susumu Nakano
Kunimitsu Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ajinomoto Co Inc
Original Assignee
Ajinomoto Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ajinomoto Co Inc filed Critical Ajinomoto Co Inc
Priority to JP6940278A priority Critical patent/JPS54160294A/en
Publication of JPS54160294A publication Critical patent/JPS54160294A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP6940278A 1978-06-09 1978-06-09 Extraneous matter detector Pending JPS54160294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6940278A JPS54160294A (en) 1978-06-09 1978-06-09 Extraneous matter detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6940278A JPS54160294A (en) 1978-06-09 1978-06-09 Extraneous matter detector

Publications (1)

Publication Number Publication Date
JPS54160294A true JPS54160294A (en) 1979-12-18

Family

ID=13401564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6940278A Pending JPS54160294A (en) 1978-06-09 1978-06-09 Extraneous matter detector

Country Status (1)

Country Link
JP (1) JPS54160294A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195568A (en) * 2003-08-01 2005-07-21 Denso Corp Foreign material inspection method and foreign material inspection device
JP2008145102A (en) * 2006-12-05 2008-06-26 Nomura Micro Sci Co Ltd Method and device for inspecting foreign matter in semiconductor polishing slurry

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244057U (en) * 1975-11-05 1977-03-29

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244057U (en) * 1975-11-05 1977-03-29

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005195568A (en) * 2003-08-01 2005-07-21 Denso Corp Foreign material inspection method and foreign material inspection device
JP4538788B2 (en) * 2003-08-01 2010-09-08 株式会社デンソー Foreign matter inspection method and foreign matter inspection device
JP2008145102A (en) * 2006-12-05 2008-06-26 Nomura Micro Sci Co Ltd Method and device for inspecting foreign matter in semiconductor polishing slurry

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