JPS54160294A - Extraneous matter detector - Google Patents
Extraneous matter detectorInfo
- Publication number
- JPS54160294A JPS54160294A JP6940278A JP6940278A JPS54160294A JP S54160294 A JPS54160294 A JP S54160294A JP 6940278 A JP6940278 A JP 6940278A JP 6940278 A JP6940278 A JP 6940278A JP S54160294 A JPS54160294 A JP S54160294A
- Authority
- JP
- Japan
- Prior art keywords
- extraneous matter
- matter detector
- detector
- extraneous
- matter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6940278A JPS54160294A (en) | 1978-06-09 | 1978-06-09 | Extraneous matter detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6940278A JPS54160294A (en) | 1978-06-09 | 1978-06-09 | Extraneous matter detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54160294A true JPS54160294A (en) | 1979-12-18 |
Family
ID=13401564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6940278A Pending JPS54160294A (en) | 1978-06-09 | 1978-06-09 | Extraneous matter detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54160294A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005195568A (en) * | 2003-08-01 | 2005-07-21 | Denso Corp | Foreign material inspection method and foreign material inspection device |
JP2008145102A (en) * | 2006-12-05 | 2008-06-26 | Nomura Micro Sci Co Ltd | Method and device for inspecting foreign matter in semiconductor polishing slurry |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5244057U (en) * | 1975-11-05 | 1977-03-29 |
-
1978
- 1978-06-09 JP JP6940278A patent/JPS54160294A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5244057U (en) * | 1975-11-05 | 1977-03-29 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005195568A (en) * | 2003-08-01 | 2005-07-21 | Denso Corp | Foreign material inspection method and foreign material inspection device |
JP4538788B2 (en) * | 2003-08-01 | 2010-09-08 | 株式会社デンソー | Foreign matter inspection method and foreign matter inspection device |
JP2008145102A (en) * | 2006-12-05 | 2008-06-26 | Nomura Micro Sci Co Ltd | Method and device for inspecting foreign matter in semiconductor polishing slurry |
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