JPS54159968U - - Google Patents
Info
- Publication number
- JPS54159968U JPS54159968U JP5773178U JP5773178U JPS54159968U JP S54159968 U JPS54159968 U JP S54159968U JP 5773178 U JP5773178 U JP 5773178U JP 5773178 U JP5773178 U JP 5773178U JP S54159968 U JPS54159968 U JP S54159968U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5773178U JPS6127176Y2 (cs) | 1978-04-28 | 1978-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5773178U JPS6127176Y2 (cs) | 1978-04-28 | 1978-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54159968U true JPS54159968U (cs) | 1979-11-08 |
| JPS6127176Y2 JPS6127176Y2 (cs) | 1986-08-13 |
Family
ID=28955887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5773178U Expired JPS6127176Y2 (cs) | 1978-04-28 | 1978-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6127176Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005006426A1 (ja) * | 2003-07-09 | 2005-01-20 | Tokyo Electron Limited | 高圧熱処理装置 |
-
1978
- 1978-04-28 JP JP5773178U patent/JPS6127176Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005006426A1 (ja) * | 2003-07-09 | 2005-01-20 | Tokyo Electron Limited | 高圧熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6127176Y2 (cs) | 1986-08-13 |