JPS5415395B2 - - Google Patents
Info
- Publication number
- JPS5415395B2 JPS5415395B2 JP6673775A JP6673775A JPS5415395B2 JP S5415395 B2 JPS5415395 B2 JP S5415395B2 JP 6673775 A JP6673775 A JP 6673775A JP 6673775 A JP6673775 A JP 6673775A JP S5415395 B2 JPS5415395 B2 JP S5415395B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50066737A JPS51142277A (en) | 1975-06-03 | 1975-06-03 | Device for electron-beam exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50066737A JPS51142277A (en) | 1975-06-03 | 1975-06-03 | Device for electron-beam exposure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51142277A JPS51142277A (en) | 1976-12-07 |
| JPS5415395B2 true JPS5415395B2 (enExample) | 1979-06-14 |
Family
ID=13324484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50066737A Granted JPS51142277A (en) | 1975-06-03 | 1975-06-03 | Device for electron-beam exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51142277A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5841722Y2 (ja) * | 1977-12-05 | 1983-09-20 | 日本真空技術株式会社 | イオン打込用のバックプレ−ト装置 |
-
1975
- 1975-06-03 JP JP50066737A patent/JPS51142277A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51142277A (en) | 1976-12-07 |