JPS5415395B2 - - Google Patents

Info

Publication number
JPS5415395B2
JPS5415395B2 JP6673775A JP6673775A JPS5415395B2 JP S5415395 B2 JPS5415395 B2 JP S5415395B2 JP 6673775 A JP6673775 A JP 6673775A JP 6673775 A JP6673775 A JP 6673775A JP S5415395 B2 JPS5415395 B2 JP S5415395B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6673775A
Other languages
Japanese (ja)
Other versions
JPS51142277A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50066737A priority Critical patent/JPS51142277A/ja
Publication of JPS51142277A publication Critical patent/JPS51142277A/ja
Publication of JPS5415395B2 publication Critical patent/JPS5415395B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP50066737A 1975-06-03 1975-06-03 Device for electron-beam exposure Granted JPS51142277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50066737A JPS51142277A (en) 1975-06-03 1975-06-03 Device for electron-beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50066737A JPS51142277A (en) 1975-06-03 1975-06-03 Device for electron-beam exposure

Publications (2)

Publication Number Publication Date
JPS51142277A JPS51142277A (en) 1976-12-07
JPS5415395B2 true JPS5415395B2 (enrdf_load_stackoverflow) 1979-06-14

Family

ID=13324484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50066737A Granted JPS51142277A (en) 1975-06-03 1975-06-03 Device for electron-beam exposure

Country Status (1)

Country Link
JP (1) JPS51142277A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841722Y2 (ja) * 1977-12-05 1983-09-20 日本真空技術株式会社 イオン打込用のバックプレ−ト装置

Also Published As

Publication number Publication date
JPS51142277A (en) 1976-12-07

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