JPS54153844A - Rotary coating for resist - Google Patents
Rotary coating for resistInfo
- Publication number
- JPS54153844A JPS54153844A JP6143878A JP6143878A JPS54153844A JP S54153844 A JPS54153844 A JP S54153844A JP 6143878 A JP6143878 A JP 6143878A JP 6143878 A JP6143878 A JP 6143878A JP S54153844 A JPS54153844 A JP S54153844A
- Authority
- JP
- Japan
- Prior art keywords
- resist
- rotary coating
- rotary
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6143878A JPS54153844A (en) | 1978-05-23 | 1978-05-23 | Rotary coating for resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6143878A JPS54153844A (en) | 1978-05-23 | 1978-05-23 | Rotary coating for resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54153844A true JPS54153844A (en) | 1979-12-04 |
Family
ID=13171062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6143878A Pending JPS54153844A (en) | 1978-05-23 | 1978-05-23 | Rotary coating for resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54153844A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62125878A (en) * | 1985-11-25 | 1987-06-08 | Mitsubishi Rayon Co Ltd | Method for curing coated film |
JP2015111312A (en) * | 2003-09-29 | 2015-06-18 | Hoya株式会社 | Mask blank and method for manufacturing transfer mask |
-
1978
- 1978-05-23 JP JP6143878A patent/JPS54153844A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62125878A (en) * | 1985-11-25 | 1987-06-08 | Mitsubishi Rayon Co Ltd | Method for curing coated film |
JP2015111312A (en) * | 2003-09-29 | 2015-06-18 | Hoya株式会社 | Mask blank and method for manufacturing transfer mask |
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