JPS54153290U - - Google Patents
Info
- Publication number
- JPS54153290U JPS54153290U JP4958478U JP4958478U JPS54153290U JP S54153290 U JPS54153290 U JP S54153290U JP 4958478 U JP4958478 U JP 4958478U JP 4958478 U JP4958478 U JP 4958478U JP S54153290 U JPS54153290 U JP S54153290U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4958478U JPS54153290U (ja) | 1978-04-14 | 1978-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4958478U JPS54153290U (ja) | 1978-04-14 | 1978-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54153290U true JPS54153290U (ja) | 1979-10-24 |
Family
ID=28935446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4958478U Pending JPS54153290U (ja) | 1978-04-14 | 1978-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54153290U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017505438A (ja) * | 2014-01-24 | 2017-02-16 | 東京エレクトロン株式会社 | 前面パターニングの調整を決定する基板の背面のテクスチャマップを生成するシステム及び方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3435232A (en) * | 1966-03-03 | 1969-03-25 | Hewlett Packard Co | Beam position detector |
| JPS4830454A (ja) * | 1971-08-23 | 1973-04-21 | ||
| JPS4839068A (ja) * | 1971-09-20 | 1973-06-08 |
-
1978
- 1978-04-14 JP JP4958478U patent/JPS54153290U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3435232A (en) * | 1966-03-03 | 1969-03-25 | Hewlett Packard Co | Beam position detector |
| JPS4830454A (ja) * | 1971-08-23 | 1973-04-21 | ||
| JPS4839068A (ja) * | 1971-09-20 | 1973-06-08 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017505438A (ja) * | 2014-01-24 | 2017-02-16 | 東京エレクトロン株式会社 | 前面パターニングの調整を決定する基板の背面のテクスチャマップを生成するシステム及び方法 |