JPS54152661U - - Google Patents
Info
- Publication number
- JPS54152661U JPS54152661U JP4958378U JP4958378U JPS54152661U JP S54152661 U JPS54152661 U JP S54152661U JP 4958378 U JP4958378 U JP 4958378U JP 4958378 U JP4958378 U JP 4958378U JP S54152661 U JPS54152661 U JP S54152661U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4958378U JPS54152661U (ru) | 1978-04-14 | 1978-04-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4958378U JPS54152661U (ru) | 1978-04-14 | 1978-04-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54152661U true JPS54152661U (ru) | 1979-10-24 |
Family
ID=28935443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4958378U Pending JPS54152661U (ru) | 1978-04-14 | 1978-04-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54152661U (ru) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887336U (ja) * | 1981-12-09 | 1983-06-14 | 日本電気株式会社 | 蝕刻装置 |
WO2003080898A1 (en) * | 2002-03-25 | 2003-10-02 | Ebara Corporation | Electrochemical machine and electrochemical machining method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5135962B2 (ru) * | 1974-05-14 | 1976-10-06 | ||
JPS533922B2 (ru) * | 1972-04-19 | 1978-02-13 |
-
1978
- 1978-04-14 JP JP4958378U patent/JPS54152661U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533922B2 (ru) * | 1972-04-19 | 1978-02-13 | ||
JPS5135962B2 (ru) * | 1974-05-14 | 1976-10-06 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887336U (ja) * | 1981-12-09 | 1983-06-14 | 日本電気株式会社 | 蝕刻装置 |
WO2003080898A1 (en) * | 2002-03-25 | 2003-10-02 | Ebara Corporation | Electrochemical machine and electrochemical machining method |