JPS5415259B2 - - Google Patents
Info
- Publication number
- JPS5415259B2 JPS5415259B2 JP10693675A JP10693675A JPS5415259B2 JP S5415259 B2 JPS5415259 B2 JP S5415259B2 JP 10693675 A JP10693675 A JP 10693675A JP 10693675 A JP10693675 A JP 10693675A JP S5415259 B2 JPS5415259 B2 JP S5415259B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10693675A JPS5230730A (en) | 1975-09-05 | 1975-09-05 | Method of forming rectangular holes by etching |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10693675A JPS5230730A (en) | 1975-09-05 | 1975-09-05 | Method of forming rectangular holes by etching |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5230730A JPS5230730A (en) | 1977-03-08 |
| JPS5415259B2 true JPS5415259B2 (online.php) | 1979-06-13 |
Family
ID=14446266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10693675A Granted JPS5230730A (en) | 1975-09-05 | 1975-09-05 | Method of forming rectangular holes by etching |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5230730A (online.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5339614B2 (online.php) * | 1973-04-17 | 1978-10-23 |
-
1975
- 1975-09-05 JP JP10693675A patent/JPS5230730A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5230730A (en) | 1977-03-08 |