JPS54152252U - - Google Patents
Info
- Publication number
- JPS54152252U JPS54152252U JP4891478U JP4891478U JPS54152252U JP S54152252 U JPS54152252 U JP S54152252U JP 4891478 U JP4891478 U JP 4891478U JP 4891478 U JP4891478 U JP 4891478U JP S54152252 U JPS54152252 U JP S54152252U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Of Gases By Adsorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4891478U JPS54152252U (en) | 1978-04-13 | 1978-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4891478U JPS54152252U (en) | 1978-04-13 | 1978-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54152252U true JPS54152252U (en) | 1979-10-23 |
Family
ID=28933524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4891478U Pending JPS54152252U (en) | 1978-04-13 | 1978-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54152252U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63209722A (en) * | 1987-02-25 | 1988-08-31 | Hitachi Ltd | Air filter of semiconductor producing device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS491392U (en) * | 1972-04-06 | 1974-01-08 |
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1978
- 1978-04-13 JP JP4891478U patent/JPS54152252U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS491392U (en) * | 1972-04-06 | 1974-01-08 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63209722A (en) * | 1987-02-25 | 1988-08-31 | Hitachi Ltd | Air filter of semiconductor producing device |