JPS54152252U - - Google Patents

Info

Publication number
JPS54152252U
JPS54152252U JP4891478U JP4891478U JPS54152252U JP S54152252 U JPS54152252 U JP S54152252U JP 4891478 U JP4891478 U JP 4891478U JP 4891478 U JP4891478 U JP 4891478U JP S54152252 U JPS54152252 U JP S54152252U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4891478U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4891478U priority Critical patent/JPS54152252U/ja
Publication of JPS54152252U publication Critical patent/JPS54152252U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP4891478U 1978-04-13 1978-04-13 Pending JPS54152252U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4891478U JPS54152252U (en) 1978-04-13 1978-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4891478U JPS54152252U (en) 1978-04-13 1978-04-13

Publications (1)

Publication Number Publication Date
JPS54152252U true JPS54152252U (en) 1979-10-23

Family

ID=28933524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4891478U Pending JPS54152252U (en) 1978-04-13 1978-04-13

Country Status (1)

Country Link
JP (1) JPS54152252U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63209722A (en) * 1987-02-25 1988-08-31 Hitachi Ltd Air filter of semiconductor producing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491392U (en) * 1972-04-06 1974-01-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS491392U (en) * 1972-04-06 1974-01-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63209722A (en) * 1987-02-25 1988-08-31 Hitachi Ltd Air filter of semiconductor producing device

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