JPS5415114Y2 - - Google Patents
Info
- Publication number
- JPS5415114Y2 JPS5415114Y2 JP8581676U JP8581676U JPS5415114Y2 JP S5415114 Y2 JPS5415114 Y2 JP S5415114Y2 JP 8581676 U JP8581676 U JP 8581676U JP 8581676 U JP8581676 U JP 8581676U JP S5415114 Y2 JPS5415114 Y2 JP S5415114Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8581676U JPS5415114Y2 (fr) | 1976-07-01 | 1976-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8581676U JPS5415114Y2 (fr) | 1976-07-01 | 1976-07-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS536284U JPS536284U (fr) | 1978-01-20 |
| JPS5415114Y2 true JPS5415114Y2 (fr) | 1979-06-19 |
Family
ID=28696716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8581676U Expired JPS5415114Y2 (fr) | 1976-07-01 | 1976-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5415114Y2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2683933B2 (ja) * | 1989-01-20 | 1997-12-03 | 信越半導体株式会社 | 半導体ウエーハの表裏および方位判定検査装置 |
-
1976
- 1976-07-01 JP JP8581676U patent/JPS5415114Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS536284U (fr) | 1978-01-20 |