JPS54148112U - - Google Patents
Info
- Publication number
- JPS54148112U JPS54148112U JP4512078U JP4512078U JPS54148112U JP S54148112 U JPS54148112 U JP S54148112U JP 4512078 U JP4512078 U JP 4512078U JP 4512078 U JP4512078 U JP 4512078U JP S54148112 U JPS54148112 U JP S54148112U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4512078U JPS54148112U (forum.php) | 1978-04-05 | 1978-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4512078U JPS54148112U (forum.php) | 1978-04-05 | 1978-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54148112U true JPS54148112U (forum.php) | 1979-10-15 |
Family
ID=28922762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4512078U Pending JPS54148112U (forum.php) | 1978-04-05 | 1978-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54148112U (forum.php) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56123065U (forum.php) * | 1980-02-21 | 1981-09-18 | ||
| US6929774B2 (en) | 1997-07-10 | 2005-08-16 | Applied Materials, Inc. | Method and apparatus for heating and cooling substrates |
| US7192494B2 (en) | 1999-03-05 | 2007-03-20 | Applied Materials, Inc. | Method and apparatus for annealing copper films |
| US7311810B2 (en) | 2003-04-18 | 2007-12-25 | Applied Materials, Inc. | Two position anneal chamber |
-
1978
- 1978-04-05 JP JP4512078U patent/JPS54148112U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56123065U (forum.php) * | 1980-02-21 | 1981-09-18 | ||
| US6929774B2 (en) | 1997-07-10 | 2005-08-16 | Applied Materials, Inc. | Method and apparatus for heating and cooling substrates |
| US7192494B2 (en) | 1999-03-05 | 2007-03-20 | Applied Materials, Inc. | Method and apparatus for annealing copper films |
| US7311810B2 (en) | 2003-04-18 | 2007-12-25 | Applied Materials, Inc. | Two position anneal chamber |