JPS54147379A - Laminated fluid controller - Google Patents

Laminated fluid controller

Info

Publication number
JPS54147379A
JPS54147379A JP5532178A JP5532178A JPS54147379A JP S54147379 A JPS54147379 A JP S54147379A JP 5532178 A JP5532178 A JP 5532178A JP 5532178 A JP5532178 A JP 5532178A JP S54147379 A JPS54147379 A JP S54147379A
Authority
JP
Japan
Prior art keywords
fluid controller
laminated fluid
laminated
controller
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5532178A
Other languages
Japanese (ja)
Inventor
Masahiko Hosono
Masato Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyooki Kogyo Co Ltd
Original Assignee
Toyooki Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyooki Kogyo Co Ltd filed Critical Toyooki Kogyo Co Ltd
Priority to JP5532178A priority Critical patent/JPS54147379A/en
Publication of JPS54147379A publication Critical patent/JPS54147379A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Pressure Circuits (AREA)
JP5532178A 1978-05-09 1978-05-09 Laminated fluid controller Pending JPS54147379A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5532178A JPS54147379A (en) 1978-05-09 1978-05-09 Laminated fluid controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5532178A JPS54147379A (en) 1978-05-09 1978-05-09 Laminated fluid controller

Publications (1)

Publication Number Publication Date
JPS54147379A true JPS54147379A (en) 1979-11-17

Family

ID=12995275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5532178A Pending JPS54147379A (en) 1978-05-09 1978-05-09 Laminated fluid controller

Country Status (1)

Country Link
JP (1) JPS54147379A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147102A (en) * 1983-02-10 1984-08-23 Shimadzu Corp Hydraulic actuator
WO2020105305A1 (en) * 2018-11-21 2020-05-28 Smc株式会社 Cylinder drive device and flow channel unit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116191B2 (en) * 1972-05-19 1976-05-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116191B2 (en) * 1972-05-19 1976-05-22

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59147102A (en) * 1983-02-10 1984-08-23 Shimadzu Corp Hydraulic actuator
WO2020105305A1 (en) * 2018-11-21 2020-05-28 Smc株式会社 Cylinder drive device and flow channel unit
JPWO2020105305A1 (en) * 2018-11-21 2021-10-07 Smc株式会社 Cylinder drive and flow path unit
US11933328B2 (en) 2018-11-21 2024-03-19 Smc Corporation Cylinder drive device and flow channel unit

Similar Documents

Publication Publication Date Title
GB2055335B (en) Fluid controller
JPS5587218A (en) Inputtoutput controller
JPS54161207A (en) Controller
DE2966851D1 (en) Glass-polycarbonate laminates
JPS5544698A (en) Controller
JPS54156202A (en) Hydraulic controller
JPS576102A (en) Hydrostatic controller
JPS5560705A (en) Fluid controller
JPS55114894A (en) Fluid power controller
JPS5566738A (en) Controller
JPS54119205A (en) Controller
GB2021038B (en) Laminates
JPS5751001A (en) Electric fluid controller
JPS5563001A (en) Controller
JPS54147379A (en) Laminated fluid controller
JPS5523756A (en) Controller
JPS54158583A (en) Hydraulic controller
JPS54133273A (en) Pressure fluid controller
JPS5543284A (en) Controller
JPS54125529A (en) Pressure controller
JPS5513598A (en) Controller
JPS54121634A (en) Controller
JPS54164260A (en) Hydraulic controller
JPS5521217A (en) Laminate
JPS5553562A (en) Laminate