JPS5414472B2 - - Google Patents
Info
- Publication number
- JPS5414472B2 JPS5414472B2 JP16062376A JP16062376A JPS5414472B2 JP S5414472 B2 JPS5414472 B2 JP S5414472B2 JP 16062376 A JP16062376 A JP 16062376A JP 16062376 A JP16062376 A JP 16062376A JP S5414472 B2 JPS5414472 B2 JP S5414472B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16062376A JPS5384566A (en) | 1976-12-29 | 1976-12-29 | Partial and sequential exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16062376A JPS5384566A (en) | 1976-12-29 | 1976-12-29 | Partial and sequential exposure method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5384566A JPS5384566A (en) | 1978-07-26 |
| JPS5414472B2 true JPS5414472B2 (en) | 1979-06-07 |
Family
ID=15718925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16062376A Granted JPS5384566A (en) | 1976-12-29 | 1976-12-29 | Partial and sequential exposure method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5384566A (en) |
-
1976
- 1976-12-29 JP JP16062376A patent/JPS5384566A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5384566A (en) | 1978-07-26 |