JPS54144262A - Highhfrequency heater - Google Patents
Highhfrequency heaterInfo
- Publication number
- JPS54144262A JPS54144262A JP5112578A JP5112578A JPS54144262A JP S54144262 A JPS54144262 A JP S54144262A JP 5112578 A JP5112578 A JP 5112578A JP 5112578 A JP5112578 A JP 5112578A JP S54144262 A JPS54144262 A JP S54144262A
- Authority
- JP
- Japan
- Prior art keywords
- highhfrequency
- heater
- highhfrequency heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5112578A JPS54144262A (en) | 1978-04-28 | 1978-04-28 | Highhfrequency heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5112578A JPS54144262A (en) | 1978-04-28 | 1978-04-28 | Highhfrequency heater |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54144262A true JPS54144262A (en) | 1979-11-10 |
Family
ID=12878078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5112578A Pending JPS54144262A (en) | 1978-04-28 | 1978-04-28 | Highhfrequency heater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54144262A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016009781A1 (en) * | 2014-07-15 | 2016-01-21 | 東京エレクトロン株式会社 | Plasma processing device |
-
1978
- 1978-04-28 JP JP5112578A patent/JPS54144262A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016009781A1 (en) * | 2014-07-15 | 2016-01-21 | 東京エレクトロン株式会社 | Plasma processing device |
JP2016021524A (en) * | 2014-07-15 | 2016-02-04 | 東京エレクトロン株式会社 | Plasma processing apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS54161465A (en) | Heater | |
JPS54150267A (en) | Heater | |
JPS54133645A (en) | Heater | |
JPS54140672A (en) | Heater | |
JPS54154676A (en) | Highhfrequency heater | |
JPS54148675A (en) | Highhfrequency heater | |
JPS54144267A (en) | Highhfrequency heater | |
JPS54140669A (en) | Highhfrequency heater | |
JPS54111974A (en) | Heater | |
JPS5498875A (en) | Heater | |
JPS5512606A (en) | Heater | |
JPS54144263A (en) | Highhfrequency heater | |
JPS54144262A (en) | Highhfrequency heater | |
JPS54140671A (en) | Heater | |
JPS5499240A (en) | Honeycombbshaped heater | |
JPS54131465A (en) | Highhfrequency heater | |
JPS54155879A (en) | Highhfrequency heater | |
JPS54140668A (en) | Highhfrequency heater | |
JPS5533732A (en) | Heater | |
AU75911S (en) | heater | |
JPS54154677A (en) | Highhfrequency heater | |
JPS54156776A (en) | Highhfrequency heater | |
JPS54156775A (en) | Highhfrequency heater | |
JPS54163164A (en) | Highhfrequency heater | |
JPS54156774A (en) | Highhfrequency heater |