JPS54144262A - Highhfrequency heater - Google Patents

Highhfrequency heater

Info

Publication number
JPS54144262A
JPS54144262A JP5112578A JP5112578A JPS54144262A JP S54144262 A JPS54144262 A JP S54144262A JP 5112578 A JP5112578 A JP 5112578A JP 5112578 A JP5112578 A JP 5112578A JP S54144262 A JPS54144262 A JP S54144262A
Authority
JP
Japan
Prior art keywords
highhfrequency
heater
highhfrequency heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5112578A
Other languages
Japanese (ja)
Inventor
Iwao Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Netsu Kigu KK
Original Assignee
Hitachi Netsu Kigu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Netsu Kigu KK filed Critical Hitachi Netsu Kigu KK
Priority to JP5112578A priority Critical patent/JPS54144262A/en
Publication of JPS54144262A publication Critical patent/JPS54144262A/en
Pending legal-status Critical Current

Links

JP5112578A 1978-04-28 1978-04-28 Highhfrequency heater Pending JPS54144262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5112578A JPS54144262A (en) 1978-04-28 1978-04-28 Highhfrequency heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5112578A JPS54144262A (en) 1978-04-28 1978-04-28 Highhfrequency heater

Publications (1)

Publication Number Publication Date
JPS54144262A true JPS54144262A (en) 1979-11-10

Family

ID=12878078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5112578A Pending JPS54144262A (en) 1978-04-28 1978-04-28 Highhfrequency heater

Country Status (1)

Country Link
JP (1) JPS54144262A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016009781A1 (en) * 2014-07-15 2016-01-21 東京エレクトロン株式会社 Plasma processing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016009781A1 (en) * 2014-07-15 2016-01-21 東京エレクトロン株式会社 Plasma processing device
JP2016021524A (en) * 2014-07-15 2016-02-04 東京エレクトロン株式会社 Plasma processing apparatus

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