JPS541413U - - Google Patents
Info
- Publication number
- JPS541413U JPS541413U JP7321577U JP7321577U JPS541413U JP S541413 U JPS541413 U JP S541413U JP 7321577 U JP7321577 U JP 7321577U JP 7321577 U JP7321577 U JP 7321577U JP S541413 U JPS541413 U JP S541413U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7321577U JPS541413U (enExample) | 1977-06-07 | 1977-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7321577U JPS541413U (enExample) | 1977-06-07 | 1977-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS541413U true JPS541413U (enExample) | 1979-01-08 |
Family
ID=28985630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7321577U Pending JPS541413U (enExample) | 1977-06-07 | 1977-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS541413U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748163A (en) * | 1980-09-03 | 1982-03-19 | Hitachi Ltd | Method and device for inspection of pattern |
-
1977
- 1977-06-07 JP JP7321577U patent/JPS541413U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5748163A (en) * | 1980-09-03 | 1982-03-19 | Hitachi Ltd | Method and device for inspection of pattern |