JPS54140659U - - Google Patents
Info
- Publication number
- JPS54140659U JPS54140659U JP3707478U JP3707478U JPS54140659U JP S54140659 U JPS54140659 U JP S54140659U JP 3707478 U JP3707478 U JP 3707478U JP 3707478 U JP3707478 U JP 3707478U JP S54140659 U JPS54140659 U JP S54140659U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3707478U JPS5758760Y2 (cs) | 1978-03-22 | 1978-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3707478U JPS5758760Y2 (cs) | 1978-03-22 | 1978-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54140659U true JPS54140659U (cs) | 1979-09-29 |
| JPS5758760Y2 JPS5758760Y2 (cs) | 1982-12-15 |
Family
ID=28899443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3707478U Expired JPS5758760Y2 (cs) | 1978-03-22 | 1978-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5758760Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58215052A (ja) * | 1982-06-08 | 1983-12-14 | Nec Corp | ウエハ−収納治具 |
-
1978
- 1978-03-22 JP JP3707478U patent/JPS5758760Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58215052A (ja) * | 1982-06-08 | 1983-12-14 | Nec Corp | ウエハ−収納治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5758760Y2 (cs) | 1982-12-15 |