JPS5414062B2 - - Google Patents
Info
- Publication number
- JPS5414062B2 JPS5414062B2 JP8060372A JP8060372A JPS5414062B2 JP S5414062 B2 JPS5414062 B2 JP S5414062B2 JP 8060372 A JP8060372 A JP 8060372A JP 8060372 A JP8060372 A JP 8060372A JP S5414062 B2 JPS5414062 B2 JP S5414062B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8060372A JPS5414062B2 (https=) | 1972-08-11 | 1972-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8060372A JPS5414062B2 (https=) | 1972-08-11 | 1972-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4939382A JPS4939382A (https=) | 1974-04-12 |
| JPS5414062B2 true JPS5414062B2 (https=) | 1979-06-04 |
Family
ID=13722891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8060372A Expired JPS5414062B2 (https=) | 1972-08-11 | 1972-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5414062B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5333240B2 (https=) * | 1973-06-01 | 1978-09-13 | ||
| JPS5199648A (ja) * | 1975-02-28 | 1976-09-02 | Nippon Denso Co | Shinkuro |
-
1972
- 1972-08-11 JP JP8060372A patent/JPS5414062B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4939382A (https=) | 1974-04-12 |