JPS5413857B2 - - Google Patents

Info

Publication number
JPS5413857B2
JPS5413857B2 JP6580274A JP6580274A JPS5413857B2 JP S5413857 B2 JPS5413857 B2 JP S5413857B2 JP 6580274 A JP6580274 A JP 6580274A JP 6580274 A JP6580274 A JP 6580274A JP S5413857 B2 JPS5413857 B2 JP S5413857B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6580274A
Other languages
Japanese (ja)
Other versions
JPS50157269A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6580274A priority Critical patent/JPS5413857B2/ja
Publication of JPS50157269A publication Critical patent/JPS50157269A/ja
Publication of JPS5413857B2 publication Critical patent/JPS5413857B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6580274A 1974-06-10 1974-06-10 Expired JPS5413857B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6580274A JPS5413857B2 (cg-RX-API-DMAC7.html) 1974-06-10 1974-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6580274A JPS5413857B2 (cg-RX-API-DMAC7.html) 1974-06-10 1974-06-10

Publications (2)

Publication Number Publication Date
JPS50157269A JPS50157269A (cg-RX-API-DMAC7.html) 1975-12-19
JPS5413857B2 true JPS5413857B2 (cg-RX-API-DMAC7.html) 1979-06-02

Family

ID=13297510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6580274A Expired JPS5413857B2 (cg-RX-API-DMAC7.html) 1974-06-10 1974-06-10

Country Status (1)

Country Link
JP (1) JPS5413857B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362862A (ja) * 1986-09-02 1988-03-19 Kobe Steel Ltd Ti及びTi合金のTiN被覆品の製造方法

Also Published As

Publication number Publication date
JPS50157269A (cg-RX-API-DMAC7.html) 1975-12-19

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