JPS54130683U - - Google Patents
Info
- Publication number
- JPS54130683U JPS54130683U JP2636578U JP2636578U JPS54130683U JP S54130683 U JPS54130683 U JP S54130683U JP 2636578 U JP2636578 U JP 2636578U JP 2636578 U JP2636578 U JP 2636578U JP S54130683 U JPS54130683 U JP S54130683U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drilling Tools (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978026365U JPS5641954Y2 (enExample) | 1978-03-03 | 1978-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978026365U JPS5641954Y2 (enExample) | 1978-03-03 | 1978-03-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54130683U true JPS54130683U (enExample) | 1979-09-11 |
| JPS5641954Y2 JPS5641954Y2 (enExample) | 1981-10-01 |
Family
ID=28868476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978026365U Expired JPS5641954Y2 (enExample) | 1978-03-03 | 1978-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5641954Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000043180A1 (en) * | 1999-01-21 | 2000-07-27 | Nikon Corporation | Drill and drilling method, stage working method, and method of manufacturing exposure device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48114379U (enExample) * | 1972-04-01 | 1973-12-27 | ||
| JPS5029594U (enExample) * | 1973-07-12 | 1975-04-03 |
-
1978
- 1978-03-03 JP JP1978026365U patent/JPS5641954Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48114379U (enExample) * | 1972-04-01 | 1973-12-27 | ||
| JPS5029594U (enExample) * | 1973-07-12 | 1975-04-03 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000043180A1 (en) * | 1999-01-21 | 2000-07-27 | Nikon Corporation | Drill and drilling method, stage working method, and method of manufacturing exposure device |
| JP2000210874A (ja) * | 1999-01-21 | 2000-08-02 | Nikon Corp | ドリル及び加工方法、並びにステ―ジ加工方法及び露光装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5641954Y2 (enExample) | 1981-10-01 |