JPS5412792B2 - - Google Patents
Info
- Publication number
- JPS5412792B2 JPS5412792B2 JP8584071A JP8584071A JPS5412792B2 JP S5412792 B2 JPS5412792 B2 JP S5412792B2 JP 8584071 A JP8584071 A JP 8584071A JP 8584071 A JP8584071 A JP 8584071A JP S5412792 B2 JPS5412792 B2 JP S5412792B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8584071A JPS5412792B2 (en) | 1971-10-27 | 1971-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8584071A JPS5412792B2 (en) | 1971-10-27 | 1971-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4851584A JPS4851584A (en) | 1973-07-19 |
| JPS5412792B2 true JPS5412792B2 (en) | 1979-05-25 |
Family
ID=13870042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8584071A Expired JPS5412792B2 (en) | 1971-10-27 | 1971-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5412792B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57193025A (en) * | 1981-05-25 | 1982-11-27 | Semiconductor Energy Lab Co Ltd | Manufacture of film |
| US4504331A (en) * | 1983-12-08 | 1985-03-12 | International Business Machines Corporation | Silicon dopant source in intermetallic semiconductor growth operations |
-
1971
- 1971-10-27 JP JP8584071A patent/JPS5412792B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4851584A (en) | 1973-07-19 |