JPS54114971A - Continuous environmental unit for semiconductor - Google Patents
Continuous environmental unit for semiconductorInfo
- Publication number
- JPS54114971A JPS54114971A JP2226478A JP2226478A JPS54114971A JP S54114971 A JPS54114971 A JP S54114971A JP 2226478 A JP2226478 A JP 2226478A JP 2226478 A JP2226478 A JP 2226478A JP S54114971 A JPS54114971 A JP S54114971A
- Authority
- JP
- Japan
- Prior art keywords
- low
- semiconductor
- carrying means
- high temperature
- conveyor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To pass through a lot of semiconductor parts continuously under low and high temperature environment, without disturbing the temperature environment in the unit, by means of the low and high temperature conveyor chambers and the carrying means connecting them.
CONSTITUTION: The unit constituted with the low temperature conveyor chamber 1, high temperature conveyor chamber 2, and the connection conveyor 3 as the horizontal coupling carrying means to connect the chambers is taken as one stage and three stages are provided longitudinally. Each stage is connected with the elevator 4 as the vertical coupling and carrying means. The semiconductor parts are continuously and alternately passed three times through the high and low temperature cycles.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2226478A JPS54114971A (en) | 1978-02-28 | 1978-02-28 | Continuous environmental unit for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2226478A JPS54114971A (en) | 1978-02-28 | 1978-02-28 | Continuous environmental unit for semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54114971A true JPS54114971A (en) | 1979-09-07 |
Family
ID=12077902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2226478A Pending JPS54114971A (en) | 1978-02-28 | 1978-02-28 | Continuous environmental unit for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54114971A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015070053A (en) * | 2013-09-27 | 2015-04-13 | 富士電機株式会社 | Junction assembly apparatus |
-
1978
- 1978-02-28 JP JP2226478A patent/JPS54114971A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015070053A (en) * | 2013-09-27 | 2015-04-13 | 富士電機株式会社 | Junction assembly apparatus |
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