JPS54114971A - Continuous environmental unit for semiconductor - Google Patents

Continuous environmental unit for semiconductor

Info

Publication number
JPS54114971A
JPS54114971A JP2226478A JP2226478A JPS54114971A JP S54114971 A JPS54114971 A JP S54114971A JP 2226478 A JP2226478 A JP 2226478A JP 2226478 A JP2226478 A JP 2226478A JP S54114971 A JPS54114971 A JP S54114971A
Authority
JP
Japan
Prior art keywords
low
semiconductor
carrying means
high temperature
conveyor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2226478A
Other languages
Japanese (ja)
Inventor
Ikuo Nibari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2226478A priority Critical patent/JPS54114971A/en
Publication of JPS54114971A publication Critical patent/JPS54114971A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE: To pass through a lot of semiconductor parts continuously under low and high temperature environment, without disturbing the temperature environment in the unit, by means of the low and high temperature conveyor chambers and the carrying means connecting them.
CONSTITUTION: The unit constituted with the low temperature conveyor chamber 1, high temperature conveyor chamber 2, and the connection conveyor 3 as the horizontal coupling carrying means to connect the chambers is taken as one stage and three stages are provided longitudinally. Each stage is connected with the elevator 4 as the vertical coupling and carrying means. The semiconductor parts are continuously and alternately passed three times through the high and low temperature cycles.
COPYRIGHT: (C)1979,JPO&Japio
JP2226478A 1978-02-28 1978-02-28 Continuous environmental unit for semiconductor Pending JPS54114971A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2226478A JPS54114971A (en) 1978-02-28 1978-02-28 Continuous environmental unit for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2226478A JPS54114971A (en) 1978-02-28 1978-02-28 Continuous environmental unit for semiconductor

Publications (1)

Publication Number Publication Date
JPS54114971A true JPS54114971A (en) 1979-09-07

Family

ID=12077902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2226478A Pending JPS54114971A (en) 1978-02-28 1978-02-28 Continuous environmental unit for semiconductor

Country Status (1)

Country Link
JP (1) JPS54114971A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070053A (en) * 2013-09-27 2015-04-13 富士電機株式会社 Junction assembly apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015070053A (en) * 2013-09-27 2015-04-13 富士電機株式会社 Junction assembly apparatus

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