JPS5411231B2 - - Google Patents
Info
- Publication number
- JPS5411231B2 JPS5411231B2 JP5458575A JP5458575A JPS5411231B2 JP S5411231 B2 JPS5411231 B2 JP S5411231B2 JP 5458575 A JP5458575 A JP 5458575A JP 5458575 A JP5458575 A JP 5458575A JP S5411231 B2 JPS5411231 B2 JP S5411231B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5458575A JPS51131280A (en) | 1975-05-12 | 1975-05-12 | Dielectric insulation separation base manufacturing process |
| CA251,240A CA1059647A (en) | 1975-05-12 | 1976-04-27 | Method of preparing dielectric insulator separated substrate for semiconductor integrated circuits |
| DE19762620814 DE2620814C3 (de) | 1975-05-12 | 1976-05-11 | Verfahren zur Herstellung einer dielektrisch isolierten Unterlage fur integrierte Halbleiterschaltungen |
| US05/888,981 US4173674A (en) | 1975-05-12 | 1978-03-22 | Dielectric insulator separated substrate for semiconductor integrated circuits |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5458575A JPS51131280A (en) | 1975-05-12 | 1975-05-12 | Dielectric insulation separation base manufacturing process |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51131280A JPS51131280A (en) | 1976-11-15 |
| JPS5411231B2 true JPS5411231B2 (enrdf_load_stackoverflow) | 1979-05-12 |
Family
ID=12974774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5458575A Granted JPS51131280A (en) | 1975-05-12 | 1975-05-12 | Dielectric insulation separation base manufacturing process |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS51131280A (enrdf_load_stackoverflow) |
| CA (1) | CA1059647A (enrdf_load_stackoverflow) |
| DE (1) | DE2620814C3 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55138229A (en) * | 1979-04-13 | 1980-10-28 | Hitachi Ltd | Manufacture of dielectric material for insulation- separation substrate |
| JPS57102044A (en) * | 1980-12-17 | 1982-06-24 | Hitachi Ltd | Insulating isolation substrate |
| JPS61166039A (ja) * | 1985-09-20 | 1986-07-26 | Hitachi Ltd | 誘電体絶縁分離基板 |
-
1975
- 1975-05-12 JP JP5458575A patent/JPS51131280A/ja active Granted
-
1976
- 1976-04-27 CA CA251,240A patent/CA1059647A/en not_active Expired
- 1976-05-11 DE DE19762620814 patent/DE2620814C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2620814C3 (de) | 1978-11-30 |
| DE2620814A1 (de) | 1976-11-25 |
| DE2620814B2 (de) | 1978-04-06 |
| JPS51131280A (en) | 1976-11-15 |
| CA1059647A (en) | 1979-07-31 |