JPS5410949U - - Google Patents
Info
- Publication number
- JPS5410949U JPS5410949U JP8265577U JP8265577U JPS5410949U JP S5410949 U JPS5410949 U JP S5410949U JP 8265577 U JP8265577 U JP 8265577U JP 8265577 U JP8265577 U JP 8265577U JP S5410949 U JPS5410949 U JP S5410949U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8265577U JPS5547871Y2 (ja�@�@) | 1977-06-23 | 1977-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8265577U JPS5547871Y2 (ja�@�@) | 1977-06-23 | 1977-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5410949U true JPS5410949U (ja�@�@) | 1979-01-24 |
| JPS5547871Y2 JPS5547871Y2 (ja�@�@) | 1980-11-10 |
Family
ID=29003714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8265577U Expired JPS5547871Y2 (ja�@�@) | 1977-06-23 | 1977-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547871Y2 (ja�@�@) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021377A (ja) * | 1983-07-15 | 1985-02-02 | Nisshin Steel Co Ltd | 付着量分布制御手段つき真空蒸着めつき装置 |
-
1977
- 1977-06-23 JP JP8265577U patent/JPS5547871Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6021377A (ja) * | 1983-07-15 | 1985-02-02 | Nisshin Steel Co Ltd | 付着量分布制御手段つき真空蒸着めつき装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5547871Y2 (ja�@�@) | 1980-11-10 |