JPS541093A - Method and apparatus for measuring concentrations of reducing agnet in chemical copper plating solution - Google Patents

Method and apparatus for measuring concentrations of reducing agnet in chemical copper plating solution

Info

Publication number
JPS541093A
JPS541093A JP6481377A JP6481377A JPS541093A JP S541093 A JPS541093 A JP S541093A JP 6481377 A JP6481377 A JP 6481377A JP 6481377 A JP6481377 A JP 6481377A JP S541093 A JPS541093 A JP S541093A
Authority
JP
Japan
Prior art keywords
agnet
reducing
plating solution
copper plating
chemical copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6481377A
Other languages
Japanese (ja)
Other versions
JPS6032820B2 (en
Inventor
Hitoshi Oka
Nobuo Sato
Kenji Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52064813A priority Critical patent/JPS6032820B2/en
Publication of JPS541093A publication Critical patent/JPS541093A/en
Publication of JPS6032820B2 publication Critical patent/JPS6032820B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To automatically measure HCHO concentrations inexpensively and readily at fast response speed and good accuracy by using two kinds of specific pH buffer solutions separately containing SO2 3 -,I2
COPYRIGHT: (C)1979,JPO&Japio
JP52064813A 1977-06-03 1977-06-03 Method and device for controlling reducing agent concentration in chemical copper plating solution Expired JPS6032820B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52064813A JPS6032820B2 (en) 1977-06-03 1977-06-03 Method and device for controlling reducing agent concentration in chemical copper plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52064813A JPS6032820B2 (en) 1977-06-03 1977-06-03 Method and device for controlling reducing agent concentration in chemical copper plating solution

Publications (2)

Publication Number Publication Date
JPS541093A true JPS541093A (en) 1979-01-06
JPS6032820B2 JPS6032820B2 (en) 1985-07-30

Family

ID=13269050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52064813A Expired JPS6032820B2 (en) 1977-06-03 1977-06-03 Method and device for controlling reducing agent concentration in chemical copper plating solution

Country Status (1)

Country Link
JP (1) JPS6032820B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104914063A (en) * 2014-03-14 2015-09-16 株式会社岛津制作所 Analytical device

Also Published As

Publication number Publication date
JPS6032820B2 (en) 1985-07-30

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