JPS5410830B2 - - Google Patents
Info
- Publication number
- JPS5410830B2 JPS5410830B2 JP15494776A JP15494776A JPS5410830B2 JP S5410830 B2 JPS5410830 B2 JP S5410830B2 JP 15494776 A JP15494776 A JP 15494776A JP 15494776 A JP15494776 A JP 15494776A JP S5410830 B2 JPS5410830 B2 JP S5410830B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15494776A JPS5379389A (en) | 1976-12-24 | 1976-12-24 | Heat treatment apparatus for mos |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15494776A JPS5379389A (en) | 1976-12-24 | 1976-12-24 | Heat treatment apparatus for mos |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5379389A JPS5379389A (en) | 1978-07-13 |
| JPS5410830B2 true JPS5410830B2 (en) | 1979-05-10 |
Family
ID=15595391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15494776A Granted JPS5379389A (en) | 1976-12-24 | 1976-12-24 | Heat treatment apparatus for mos |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5379389A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2610809B2 (en) * | 1985-02-19 | 1997-05-14 | ローム 株式会社 | Method for manufacturing semiconductor device |
-
1976
- 1976-12-24 JP JP15494776A patent/JPS5379389A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5379389A (en) | 1978-07-13 |