JPS5410350B2 - - Google Patents
Info
- Publication number
- JPS5410350B2 JPS5410350B2 JP5544075A JP5544075A JPS5410350B2 JP S5410350 B2 JPS5410350 B2 JP S5410350B2 JP 5544075 A JP5544075 A JP 5544075A JP 5544075 A JP5544075 A JP 5544075A JP S5410350 B2 JPS5410350 B2 JP S5410350B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5544075A JPS51131461A (en) | 1975-05-13 | 1975-05-13 | A vacuum treatment chamber apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5544075A JPS51131461A (en) | 1975-05-13 | 1975-05-13 | A vacuum treatment chamber apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51131461A JPS51131461A (en) | 1976-11-15 |
JPS5410350B2 true JPS5410350B2 (en) | 1979-05-04 |
Family
ID=12998643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5544075A Granted JPS51131461A (en) | 1975-05-13 | 1975-05-13 | A vacuum treatment chamber apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51131461A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5385741A (en) * | 1977-01-07 | 1978-07-28 | Nippon Steel Corp | Continuous evaporation plating method of steel band |
US4313815A (en) * | 1978-04-07 | 1982-02-02 | Varian Associates, Inc. | Sputter-coating system, and vaccuum valve, transport, and sputter source array arrangements therefor |
JPS54153740A (en) * | 1978-05-25 | 1979-12-04 | Ulvac Corp | Continuous vacuum treatment apparatus |
JPS5572028A (en) * | 1978-11-24 | 1980-05-30 | Ckd Corp | Device for dipping electrolyte of condenser |
US4438723A (en) * | 1981-09-28 | 1984-03-27 | Energy Conversion Devices, Inc. | Multiple chamber deposition and isolation system and method |
JP3394293B2 (en) * | 1993-09-20 | 2003-04-07 | 株式会社日立製作所 | Method for transporting sample and method for manufacturing semiconductor device |
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1975
- 1975-05-13 JP JP5544075A patent/JPS51131461A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS51131461A (en) | 1976-11-15 |