JPS54101978U - - Google Patents

Info

Publication number
JPS54101978U
JPS54101978U JP13786678U JP13786678U JPS54101978U JP S54101978 U JPS54101978 U JP S54101978U JP 13786678 U JP13786678 U JP 13786678U JP 13786678 U JP13786678 U JP 13786678U JP S54101978 U JPS54101978 U JP S54101978U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13786678U
Other languages
Japanese (ja)
Other versions
JPS595972Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978137866U priority Critical patent/JPS595972Y2/ja
Publication of JPS54101978U publication Critical patent/JPS54101978U/ja
Application granted granted Critical
Publication of JPS595972Y2 publication Critical patent/JPS595972Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP1978137866U 1978-10-09 1978-10-09 プラズマエツチング装置 Expired JPS595972Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978137866U JPS595972Y2 (ja) 1978-10-09 1978-10-09 プラズマエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978137866U JPS595972Y2 (ja) 1978-10-09 1978-10-09 プラズマエツチング装置

Publications (2)

Publication Number Publication Date
JPS54101978U true JPS54101978U (enrdf_load_stackoverflow) 1979-07-18
JPS595972Y2 JPS595972Y2 (ja) 1984-02-23

Family

ID=29110476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978137866U Expired JPS595972Y2 (ja) 1978-10-09 1978-10-09 プラズマエツチング装置

Country Status (1)

Country Link
JP (1) JPS595972Y2 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3661747A (en) * 1969-08-11 1972-05-09 Bell Telephone Labor Inc Method for etching thin film materials by direct cathodic back sputtering
JPS48103433A (enrdf_load_stackoverflow) * 1972-04-17 1973-12-25
JPS4957775A (enrdf_load_stackoverflow) * 1972-10-02 1974-06-05

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3661747A (en) * 1969-08-11 1972-05-09 Bell Telephone Labor Inc Method for etching thin film materials by direct cathodic back sputtering
JPS48103433A (enrdf_load_stackoverflow) * 1972-04-17 1973-12-25
JPS4957775A (enrdf_load_stackoverflow) * 1972-10-02 1974-06-05

Also Published As

Publication number Publication date
JPS595972Y2 (ja) 1984-02-23

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