JPS5397453U - - Google Patents
Info
- Publication number
- JPS5397453U JPS5397453U JP274378U JP274378U JPS5397453U JP S5397453 U JPS5397453 U JP S5397453U JP 274378 U JP274378 U JP 274378U JP 274378 U JP274378 U JP 274378U JP S5397453 U JPS5397453 U JP S5397453U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP274378U JPS5397453U (pt) | 1978-01-13 | 1978-01-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP274378U JPS5397453U (pt) | 1978-01-13 | 1978-01-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5397453U true JPS5397453U (pt) | 1978-08-08 |
Family
ID=28689736
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP274378U Pending JPS5397453U (pt) | 1978-01-13 | 1978-01-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5397453U (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180121671A (ko) * | 2010-10-28 | 2018-11-07 | 듀르 시스템스 아게 | 가스상 유체를 주입하는 장치를 구비한 프로세스 챔버 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022857B1 (pt) * | 1969-09-20 | 1975-08-02 |
-
1978
- 1978-01-13 JP JP274378U patent/JPS5397453U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5022857B1 (pt) * | 1969-09-20 | 1975-08-02 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180121671A (ko) * | 2010-10-28 | 2018-11-07 | 듀르 시스템스 아게 | 가스상 유체를 주입하는 장치를 구비한 프로세스 챔버 |