JPS539290A - Ozone supplier - Google Patents

Ozone supplier

Info

Publication number
JPS539290A
JPS539290A JP8332076A JP8332076A JPS539290A JP S539290 A JPS539290 A JP S539290A JP 8332076 A JP8332076 A JP 8332076A JP 8332076 A JP8332076 A JP 8332076A JP S539290 A JPS539290 A JP S539290A
Authority
JP
Japan
Prior art keywords
group
zones
adsorption
ozone supplier
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8332076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5437075B2 (OSRAM
Inventor
Eikichi Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8332076A priority Critical patent/JPS539290A/ja
Publication of JPS539290A publication Critical patent/JPS539290A/ja
Publication of JPS5437075B2 publication Critical patent/JPS5437075B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP8332076A 1976-07-13 1976-07-13 Ozone supplier Granted JPS539290A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8332076A JPS539290A (en) 1976-07-13 1976-07-13 Ozone supplier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8332076A JPS539290A (en) 1976-07-13 1976-07-13 Ozone supplier

Publications (2)

Publication Number Publication Date
JPS539290A true JPS539290A (en) 1978-01-27
JPS5437075B2 JPS5437075B2 (OSRAM) 1979-11-13

Family

ID=13799124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8332076A Granted JPS539290A (en) 1976-07-13 1976-07-13 Ozone supplier

Country Status (1)

Country Link
JP (1) JPS539290A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62502682A (ja) * 1985-04-16 1987-10-15 ル　エ−ル　リクイツド　ソシエテ　アノニム　プ−ル　ル　エチユド　エ　ル　エクスプルワテシヨン　デ　プロセデ　ジエオルジエ　クロ−ド オゾン製造方法および設備
JPH1192110A (ja) * 1997-09-12 1999-04-06 Ishikawajima Harima Heavy Ind Co Ltd オゾン吸脱着装置とその温度制御方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008062534A1 (en) * 2006-11-24 2008-05-29 Iwatani Corporation Method of concentrating ozone gas and apparatus therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62502682A (ja) * 1985-04-16 1987-10-15 ル　エ−ル　リクイツド　ソシエテ　アノニム　プ−ル　ル　エチユド　エ　ル　エクスプルワテシヨン　デ　プロセデ　ジエオルジエ　クロ−ド オゾン製造方法および設備
JPH1192110A (ja) * 1997-09-12 1999-04-06 Ishikawajima Harima Heavy Ind Co Ltd オゾン吸脱着装置とその温度制御方法

Also Published As

Publication number Publication date
JPS5437075B2 (OSRAM) 1979-11-13

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