JPS5392390U - - Google Patents

Info

Publication number
JPS5392390U
JPS5392390U JP17827176U JP17827176U JPS5392390U JP S5392390 U JPS5392390 U JP S5392390U JP 17827176 U JP17827176 U JP 17827176U JP 17827176 U JP17827176 U JP 17827176U JP S5392390 U JPS5392390 U JP S5392390U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17827176U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17827176U priority Critical patent/JPS5392390U/ja
Publication of JPS5392390U publication Critical patent/JPS5392390U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Coating Apparatus (AREA)
JP17827176U 1976-12-27 1976-12-27 Pending JPS5392390U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17827176U JPS5392390U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-27 1976-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17827176U JPS5392390U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-27 1976-12-27

Publications (1)

Publication Number Publication Date
JPS5392390U true JPS5392390U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-07-28

Family

ID=28785505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17827176U Pending JPS5392390U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-27 1976-12-27

Country Status (1)

Country Link
JP (1) JPS5392390U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011131188A (ja) * 2009-12-25 2011-07-07 Tokyo Electron Ltd 薬液供給ノズル及び薬液供給方法
JP2016099200A (ja) * 2014-11-20 2016-05-30 日本碍子株式会社 液体滴下方法及びセンサ素子の評価方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011131188A (ja) * 2009-12-25 2011-07-07 Tokyo Electron Ltd 薬液供給ノズル及び薬液供給方法
JP2016099200A (ja) * 2014-11-20 2016-05-30 日本碍子株式会社 液体滴下方法及びセンサ素子の評価方法

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