JPS539189B2 - - Google Patents

Info

Publication number
JPS539189B2
JPS539189B2 JP12525572A JP12525572A JPS539189B2 JP S539189 B2 JPS539189 B2 JP S539189B2 JP 12525572 A JP12525572 A JP 12525572A JP 12525572 A JP12525572 A JP 12525572A JP S539189 B2 JPS539189 B2 JP S539189B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12525572A
Other languages
Japanese (ja)
Other versions
JPS4982587A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12525572A priority Critical patent/JPS539189B2/ja
Publication of JPS4982587A publication Critical patent/JPS4982587A/ja
Publication of JPS539189B2 publication Critical patent/JPS539189B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12525572A 1972-12-15 1972-12-15 Expired JPS539189B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12525572A JPS539189B2 (enExample) 1972-12-15 1972-12-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12525572A JPS539189B2 (enExample) 1972-12-15 1972-12-15

Publications (2)

Publication Number Publication Date
JPS4982587A JPS4982587A (enExample) 1974-08-08
JPS539189B2 true JPS539189B2 (enExample) 1978-04-04

Family

ID=14905566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12525572A Expired JPS539189B2 (enExample) 1972-12-15 1972-12-15

Country Status (1)

Country Link
JP (1) JPS539189B2 (enExample)

Also Published As

Publication number Publication date
JPS4982587A (enExample) 1974-08-08

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