JPS5390583A - Flow controller - Google Patents

Flow controller

Info

Publication number
JPS5390583A
JPS5390583A JP459677A JP459677A JPS5390583A JP S5390583 A JPS5390583 A JP S5390583A JP 459677 A JP459677 A JP 459677A JP 459677 A JP459677 A JP 459677A JP S5390583 A JPS5390583 A JP S5390583A
Authority
JP
Japan
Prior art keywords
flow controller
feedback
correspond
allowing
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP459677A
Other languages
Japanese (ja)
Inventor
Isamu Okuda
Yasukiyo Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP459677A priority Critical patent/JPS5390583A/en
Publication of JPS5390583A publication Critical patent/JPS5390583A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide the instantaneous flow control by allowing to correspond to the control signal transmitted from the outside by feedback of the output signal in detecting the accurate magnet valve opening.
COPYRIGHT: (C)1978,JPO&Japio
JP459677A 1977-01-18 1977-01-18 Flow controller Pending JPS5390583A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP459677A JPS5390583A (en) 1977-01-18 1977-01-18 Flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP459677A JPS5390583A (en) 1977-01-18 1977-01-18 Flow controller

Publications (1)

Publication Number Publication Date
JPS5390583A true JPS5390583A (en) 1978-08-09

Family

ID=11588412

Family Applications (1)

Application Number Title Priority Date Filing Date
JP459677A Pending JPS5390583A (en) 1977-01-18 1977-01-18 Flow controller

Country Status (1)

Country Link
JP (1) JPS5390583A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0651906U (en) * 1992-11-27 1994-07-15 日本タイラン株式会社 Mass flow controller using strain gauge

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121098B1 (en) * 1970-06-19 1976-06-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5121098B1 (en) * 1970-06-19 1976-06-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0651906U (en) * 1992-11-27 1994-07-15 日本タイラン株式会社 Mass flow controller using strain gauge

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