JPS5390583A - Flow controller - Google Patents
Flow controllerInfo
- Publication number
- JPS5390583A JPS5390583A JP459677A JP459677A JPS5390583A JP S5390583 A JPS5390583 A JP S5390583A JP 459677 A JP459677 A JP 459677A JP 459677 A JP459677 A JP 459677A JP S5390583 A JPS5390583 A JP S5390583A
- Authority
- JP
- Japan
- Prior art keywords
- flow controller
- feedback
- correspond
- allowing
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide the instantaneous flow control by allowing to correspond to the control signal transmitted from the outside by feedback of the output signal in detecting the accurate magnet valve opening.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP459677A JPS5390583A (en) | 1977-01-18 | 1977-01-18 | Flow controller |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP459677A JPS5390583A (en) | 1977-01-18 | 1977-01-18 | Flow controller |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5390583A true JPS5390583A (en) | 1978-08-09 |
Family
ID=11588412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP459677A Pending JPS5390583A (en) | 1977-01-18 | 1977-01-18 | Flow controller |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5390583A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0651906U (en) * | 1992-11-27 | 1994-07-15 | 日本タイラン株式会社 | Mass flow controller using strain gauge |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5121098B1 (en) * | 1970-06-19 | 1976-06-30 |
-
1977
- 1977-01-18 JP JP459677A patent/JPS5390583A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5121098B1 (en) * | 1970-06-19 | 1976-06-30 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0651906U (en) * | 1992-11-27 | 1994-07-15 | 日本タイラン株式会社 | Mass flow controller using strain gauge |
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