JPS539007B2 - - Google Patents

Info

Publication number
JPS539007B2
JPS539007B2 JP12018172A JP12018172A JPS539007B2 JP S539007 B2 JPS539007 B2 JP S539007B2 JP 12018172 A JP12018172 A JP 12018172A JP 12018172 A JP12018172 A JP 12018172A JP S539007 B2 JPS539007 B2 JP S539007B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12018172A
Other languages
Japanese (ja)
Other versions
JPS4977419A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12018172A priority Critical patent/JPS539007B2/ja
Publication of JPS4977419A publication Critical patent/JPS4977419A/ja
Publication of JPS539007B2 publication Critical patent/JPS539007B2/ja
Expired legal-status Critical Current

Links

JP12018172A 1972-11-30 1972-11-30 Expired JPS539007B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12018172A JPS539007B2 (enExample) 1972-11-30 1972-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12018172A JPS539007B2 (enExample) 1972-11-30 1972-11-30

Publications (2)

Publication Number Publication Date
JPS4977419A JPS4977419A (enExample) 1974-07-25
JPS539007B2 true JPS539007B2 (enExample) 1978-04-03

Family

ID=14779909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12018172A Expired JPS539007B2 (enExample) 1972-11-30 1972-11-30

Country Status (1)

Country Link
JP (1) JPS539007B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197208A (ja) * 1984-03-21 1985-10-05 Canon Inc 成膜装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5161721U (enExample) * 1974-11-11 1976-05-15
JPS51117418U (enExample) * 1975-03-19 1976-09-24
JPS5211618A (en) * 1975-07-16 1977-01-28 Kubota Ltd Method of tiling over tile and tile

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197208A (ja) * 1984-03-21 1985-10-05 Canon Inc 成膜装置

Also Published As

Publication number Publication date
JPS4977419A (enExample) 1974-07-25

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