JPS539007B2 - - Google Patents
Info
- Publication number
- JPS539007B2 JPS539007B2 JP12018172A JP12018172A JPS539007B2 JP S539007 B2 JPS539007 B2 JP S539007B2 JP 12018172 A JP12018172 A JP 12018172A JP 12018172 A JP12018172 A JP 12018172A JP S539007 B2 JPS539007 B2 JP S539007B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12018172A JPS539007B2 (en:Method) | 1972-11-30 | 1972-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12018172A JPS539007B2 (en:Method) | 1972-11-30 | 1972-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4977419A JPS4977419A (en:Method) | 1974-07-25 |
| JPS539007B2 true JPS539007B2 (en:Method) | 1978-04-03 |
Family
ID=14779909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12018172A Expired JPS539007B2 (en:Method) | 1972-11-30 | 1972-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS539007B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197208A (ja) * | 1984-03-21 | 1985-10-05 | Canon Inc | 成膜装置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5161721U (en:Method) * | 1974-11-11 | 1976-05-15 | ||
| JPS51117418U (en:Method) * | 1975-03-19 | 1976-09-24 | ||
| JPS5211618A (en) * | 1975-07-16 | 1977-01-28 | Kubota Ltd | Method of tiling over tile and tile |
-
1972
- 1972-11-30 JP JP12018172A patent/JPS539007B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197208A (ja) * | 1984-03-21 | 1985-10-05 | Canon Inc | 成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4977419A (en:Method) | 1974-07-25 |