JPS5390052U - - Google Patents

Info

Publication number
JPS5390052U
JPS5390052U JP17430676U JP17430676U JPS5390052U JP S5390052 U JPS5390052 U JP S5390052U JP 17430676 U JP17430676 U JP 17430676U JP 17430676 U JP17430676 U JP 17430676U JP S5390052 U JPS5390052 U JP S5390052U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17430676U
Other languages
Japanese (ja)
Other versions
JPS575519Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976174306U priority Critical patent/JPS575519Y2/ja
Publication of JPS5390052U publication Critical patent/JPS5390052U/ja
Application granted granted Critical
Publication of JPS575519Y2 publication Critical patent/JPS575519Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Furnace Charging Or Discharging (AREA)
JP1976174306U 1976-12-25 1976-12-25 Expired JPS575519Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976174306U JPS575519Y2 (enrdf_load_stackoverflow) 1976-12-25 1976-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976174306U JPS575519Y2 (enrdf_load_stackoverflow) 1976-12-25 1976-12-25

Publications (2)

Publication Number Publication Date
JPS5390052U true JPS5390052U (enrdf_load_stackoverflow) 1978-07-24
JPS575519Y2 JPS575519Y2 (enrdf_load_stackoverflow) 1982-02-02

Family

ID=28781772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976174306U Expired JPS575519Y2 (enrdf_load_stackoverflow) 1976-12-25 1976-12-25

Country Status (1)

Country Link
JP (1) JPS575519Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646798U (enrdf_load_stackoverflow) * 1979-08-31 1981-04-25
JP2016151043A (ja) * 2015-02-17 2016-08-22 三井金属鉱業株式会社 セラミックス製ターゲット材の製造方法および円筒形スパッタリングターゲット

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6678157B2 (ja) * 2015-02-25 2020-04-08 三井金属鉱業株式会社 円筒形ターゲット材の製造方法および円筒形スパッタリングターゲットの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646798U (enrdf_load_stackoverflow) * 1979-08-31 1981-04-25
JP2016151043A (ja) * 2015-02-17 2016-08-22 三井金属鉱業株式会社 セラミックス製ターゲット材の製造方法および円筒形スパッタリングターゲット

Also Published As

Publication number Publication date
JPS575519Y2 (enrdf_load_stackoverflow) 1982-02-02

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