JPS5389278U - - Google Patents
Info
- Publication number
- JPS5389278U JPS5389278U JP17226076U JP17226076U JPS5389278U JP S5389278 U JPS5389278 U JP S5389278U JP 17226076 U JP17226076 U JP 17226076U JP 17226076 U JP17226076 U JP 17226076U JP S5389278 U JPS5389278 U JP S5389278U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17226076U JPS5389278U (pl) | 1976-12-22 | 1976-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17226076U JPS5389278U (pl) | 1976-12-22 | 1976-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5389278U true JPS5389278U (pl) | 1978-07-21 |
Family
ID=28779764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17226076U Pending JPS5389278U (pl) | 1976-12-22 | 1976-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5389278U (pl) |
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1976
- 1976-12-22 JP JP17226076U patent/JPS5389278U/ja active Pending