JPS5389161U - - Google Patents
Info
- Publication number
- JPS5389161U JPS5389161U JP17105776U JP17105776U JPS5389161U JP S5389161 U JPS5389161 U JP S5389161U JP 17105776 U JP17105776 U JP 17105776U JP 17105776 U JP17105776 U JP 17105776U JP S5389161 U JPS5389161 U JP S5389161U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17105776U JPS5389161U (fr) | 1976-12-21 | 1976-12-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17105776U JPS5389161U (fr) | 1976-12-21 | 1976-12-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5389161U true JPS5389161U (fr) | 1978-07-21 |
Family
ID=28778588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17105776U Pending JPS5389161U (fr) | 1976-12-21 | 1976-12-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5389161U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0437027A (ja) * | 1990-06-01 | 1992-02-07 | Toshiba Ceramics Co Ltd | ウエハ支持ボート |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884570A (fr) * | 1972-02-10 | 1973-11-09 | ||
JPS5081160A (fr) * | 1973-11-17 | 1975-07-01 |
-
1976
- 1976-12-21 JP JP17105776U patent/JPS5389161U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4884570A (fr) * | 1972-02-10 | 1973-11-09 | ||
JPS5081160A (fr) * | 1973-11-17 | 1975-07-01 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0437027A (ja) * | 1990-06-01 | 1992-02-07 | Toshiba Ceramics Co Ltd | ウエハ支持ボート |