JPS5389161U - - Google Patents

Info

Publication number
JPS5389161U
JPS5389161U JP17105776U JP17105776U JPS5389161U JP S5389161 U JPS5389161 U JP S5389161U JP 17105776 U JP17105776 U JP 17105776U JP 17105776 U JP17105776 U JP 17105776U JP S5389161 U JPS5389161 U JP S5389161U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17105776U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17105776U priority Critical patent/JPS5389161U/ja
Publication of JPS5389161U publication Critical patent/JPS5389161U/ja
Pending legal-status Critical Current

Links

JP17105776U 1976-12-21 1976-12-21 Pending JPS5389161U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17105776U JPS5389161U (enExample) 1976-12-21 1976-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17105776U JPS5389161U (enExample) 1976-12-21 1976-12-21

Publications (1)

Publication Number Publication Date
JPS5389161U true JPS5389161U (enExample) 1978-07-21

Family

ID=28778588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17105776U Pending JPS5389161U (enExample) 1976-12-21 1976-12-21

Country Status (1)

Country Link
JP (1) JPS5389161U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437027A (ja) * 1990-06-01 1992-02-07 Toshiba Ceramics Co Ltd ウエハ支持ボート

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884570A (enExample) * 1972-02-10 1973-11-09
JPS5081160A (enExample) * 1973-11-17 1975-07-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884570A (enExample) * 1972-02-10 1973-11-09
JPS5081160A (enExample) * 1973-11-17 1975-07-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437027A (ja) * 1990-06-01 1992-02-07 Toshiba Ceramics Co Ltd ウエハ支持ボート

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