JPS5388663A - Temperature controller for cold trap - Google Patents

Temperature controller for cold trap

Info

Publication number
JPS5388663A
JPS5388663A JP248677A JP248677A JPS5388663A JP S5388663 A JPS5388663 A JP S5388663A JP 248677 A JP248677 A JP 248677A JP 248677 A JP248677 A JP 248677A JP S5388663 A JPS5388663 A JP S5388663A
Authority
JP
Japan
Prior art keywords
cold trap
temperature controller
way valve
preheating
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP248677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS563765B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Matsunaga
Jun Hirozawa
Masao Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP248677A priority Critical patent/JPS5388663A/ja
Publication of JPS5388663A publication Critical patent/JPS5388663A/ja
Publication of JPS563765B2 publication Critical patent/JPS563765B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Control Of Temperature (AREA)
JP248677A 1977-01-14 1977-01-14 Temperature controller for cold trap Granted JPS5388663A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP248677A JPS5388663A (en) 1977-01-14 1977-01-14 Temperature controller for cold trap

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP248677A JPS5388663A (en) 1977-01-14 1977-01-14 Temperature controller for cold trap

Publications (2)

Publication Number Publication Date
JPS5388663A true JPS5388663A (en) 1978-08-04
JPS563765B2 JPS563765B2 (enrdf_load_stackoverflow) 1981-01-27

Family

ID=11530676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP248677A Granted JPS5388663A (en) 1977-01-14 1977-01-14 Temperature controller for cold trap

Country Status (1)

Country Link
JP (1) JPS5388663A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156808A (ja) * 1987-12-15 1989-06-20 Sanden Corp 金型等の冷却システム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57138552U (enrdf_load_stackoverflow) * 1981-02-23 1982-08-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156808A (ja) * 1987-12-15 1989-06-20 Sanden Corp 金型等の冷却システム

Also Published As

Publication number Publication date
JPS563765B2 (enrdf_load_stackoverflow) 1981-01-27

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