JPS5388560U - - Google Patents

Info

Publication number
JPS5388560U
JPS5388560U JP17082276U JP17082276U JPS5388560U JP S5388560 U JPS5388560 U JP S5388560U JP 17082276 U JP17082276 U JP 17082276U JP 17082276 U JP17082276 U JP 17082276U JP S5388560 U JPS5388560 U JP S5388560U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17082276U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17082276U priority Critical patent/JPS5388560U/ja
Publication of JPS5388560U publication Critical patent/JPS5388560U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17082276U 1976-12-22 1976-12-22 Pending JPS5388560U (bs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17082276U JPS5388560U (bs) 1976-12-22 1976-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17082276U JPS5388560U (bs) 1976-12-22 1976-12-22

Publications (1)

Publication Number Publication Date
JPS5388560U true JPS5388560U (bs) 1978-07-20

Family

ID=28778360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17082276U Pending JPS5388560U (bs) 1976-12-22 1976-12-22

Country Status (1)

Country Link
JP (1) JPS5388560U (bs)

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