JPS5387053U - - Google Patents

Info

Publication number
JPS5387053U
JPS5387053U JP16993176U JP16993176U JPS5387053U JP S5387053 U JPS5387053 U JP S5387053U JP 16993176 U JP16993176 U JP 16993176U JP 16993176 U JP16993176 U JP 16993176U JP S5387053 U JPS5387053 U JP S5387053U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16993176U
Other languages
Japanese (ja)
Other versions
JPS5625232Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16993176U priority Critical patent/JPS5625232Y2/ja
Publication of JPS5387053U publication Critical patent/JPS5387053U/ja
Application granted granted Critical
Publication of JPS5625232Y2 publication Critical patent/JPS5625232Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP16993176U 1976-12-17 1976-12-17 Expired JPS5625232Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16993176U JPS5625232Y2 (en:Method) 1976-12-17 1976-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16993176U JPS5625232Y2 (en:Method) 1976-12-17 1976-12-17

Publications (2)

Publication Number Publication Date
JPS5387053U true JPS5387053U (en:Method) 1978-07-18
JPS5625232Y2 JPS5625232Y2 (en:Method) 1981-06-15

Family

ID=28777503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16993176U Expired JPS5625232Y2 (en:Method) 1976-12-17 1976-12-17

Country Status (1)

Country Link
JP (1) JPS5625232Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5625232Y2 (en:Method) 1981-06-15

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