JPS5385175A - Monitoring device of charged particle beam radiation apparatus - Google Patents
Monitoring device of charged particle beam radiation apparatusInfo
- Publication number
- JPS5385175A JPS5385175A JP66777A JP66777A JPS5385175A JP S5385175 A JPS5385175 A JP S5385175A JP 66777 A JP66777 A JP 66777A JP 66777 A JP66777 A JP 66777A JP S5385175 A JPS5385175 A JP S5385175A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- monitoring device
- particle beam
- beam radiation
- radiation apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To constantly monitor ion implantation by making the deflecting signals of charged particle beams to the input of each axis of an oscilloscope and making the secondary electron quantities from the target part to the luminance input of the oscilloscope.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP66777A JPS5385175A (en) | 1977-01-06 | 1977-01-06 | Monitoring device of charged particle beam radiation apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP66777A JPS5385175A (en) | 1977-01-06 | 1977-01-06 | Monitoring device of charged particle beam radiation apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5385175A true JPS5385175A (en) | 1978-07-27 |
Family
ID=11480082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP66777A Pending JPS5385175A (en) | 1977-01-06 | 1977-01-06 | Monitoring device of charged particle beam radiation apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5385175A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01320500A (en) * | 1988-06-22 | 1989-12-26 | Mitsubishi Electric Corp | Radiation exposure device |
-
1977
- 1977-01-06 JP JP66777A patent/JPS5385175A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01320500A (en) * | 1988-06-22 | 1989-12-26 | Mitsubishi Electric Corp | Radiation exposure device |
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