JPS5385175A - Monitoring device of charged particle beam radiation apparatus - Google Patents

Monitoring device of charged particle beam radiation apparatus

Info

Publication number
JPS5385175A
JPS5385175A JP66777A JP66777A JPS5385175A JP S5385175 A JPS5385175 A JP S5385175A JP 66777 A JP66777 A JP 66777A JP 66777 A JP66777 A JP 66777A JP S5385175 A JPS5385175 A JP S5385175A
Authority
JP
Japan
Prior art keywords
charged particle
monitoring device
particle beam
beam radiation
radiation apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP66777A
Other languages
Japanese (ja)
Inventor
Katsuhiro Tsukamoto
Hirotomo Ooga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP66777A priority Critical patent/JPS5385175A/en
Publication of JPS5385175A publication Critical patent/JPS5385175A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To constantly monitor ion implantation by making the deflecting signals of charged particle beams to the input of each axis of an oscilloscope and making the secondary electron quantities from the target part to the luminance input of the oscilloscope.
COPYRIGHT: (C)1978,JPO&Japio
JP66777A 1977-01-06 1977-01-06 Monitoring device of charged particle beam radiation apparatus Pending JPS5385175A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP66777A JPS5385175A (en) 1977-01-06 1977-01-06 Monitoring device of charged particle beam radiation apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP66777A JPS5385175A (en) 1977-01-06 1977-01-06 Monitoring device of charged particle beam radiation apparatus

Publications (1)

Publication Number Publication Date
JPS5385175A true JPS5385175A (en) 1978-07-27

Family

ID=11480082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP66777A Pending JPS5385175A (en) 1977-01-06 1977-01-06 Monitoring device of charged particle beam radiation apparatus

Country Status (1)

Country Link
JP (1) JPS5385175A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01320500A (en) * 1988-06-22 1989-12-26 Mitsubishi Electric Corp Radiation exposure device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01320500A (en) * 1988-06-22 1989-12-26 Mitsubishi Electric Corp Radiation exposure device

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