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TSUDA KOUGIYOU KK
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TSUDA KOUGIYOU KK
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Application filed by TSUDA KOUGIYOU KKfiledCriticalTSUDA KOUGIYOU KK
Priority to JP51156785ApriorityCriticalpatent/JPS5938538B2/en
Publication of JPS5381186ApublicationCriticalpatent/JPS5381186A/en
Publication of JPS5938538B2publicationCriticalpatent/JPS5938538B2/en
Apparatus for detecting a substance whose presence is to be detected in one or several chambers of a set of measuring chambers maintained at ultra-high vacuum and its use in the detection of leaks