JPS538093Y2 - - Google Patents

Info

Publication number
JPS538093Y2
JPS538093Y2 JP8173873U JP8173873U JPS538093Y2 JP S538093 Y2 JPS538093 Y2 JP S538093Y2 JP 8173873 U JP8173873 U JP 8173873U JP 8173873 U JP8173873 U JP 8173873U JP S538093 Y2 JPS538093 Y2 JP S538093Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8173873U
Other languages
Japanese (ja)
Other versions
JPS5028419U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8173873U priority Critical patent/JPS538093Y2/ja
Publication of JPS5028419U publication Critical patent/JPS5028419U/ja
Application granted granted Critical
Publication of JPS538093Y2 publication Critical patent/JPS538093Y2/ja
Expired legal-status Critical Current

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JP8173873U 1973-07-10 1973-07-10 Expired JPS538093Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8173873U JPS538093Y2 (enrdf_load_stackoverflow) 1973-07-10 1973-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8173873U JPS538093Y2 (enrdf_load_stackoverflow) 1973-07-10 1973-07-10

Publications (2)

Publication Number Publication Date
JPS5028419U JPS5028419U (enrdf_load_stackoverflow) 1975-04-01
JPS538093Y2 true JPS538093Y2 (enrdf_load_stackoverflow) 1978-03-02

Family

ID=28260460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8173873U Expired JPS538093Y2 (enrdf_load_stackoverflow) 1973-07-10 1973-07-10

Country Status (1)

Country Link
JP (1) JPS538093Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0113428Y2 (enrdf_load_stackoverflow) * 1980-09-11 1989-04-19
JP6303024B2 (ja) * 2013-12-23 2018-03-28 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 真空プロセス下で基板を保持する保持アレンジメント、基板上に層を堆積する装置、及び保持アレンジメントを搬送する方法

Also Published As

Publication number Publication date
JPS5028419U (enrdf_load_stackoverflow) 1975-04-01

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