JPS538063A - Illuminance controlling apparatus - Google Patents

Illuminance controlling apparatus

Info

Publication number
JPS538063A
JPS538063A JP8197276A JP8197276A JPS538063A JP S538063 A JPS538063 A JP S538063A JP 8197276 A JP8197276 A JP 8197276A JP 8197276 A JP8197276 A JP 8197276A JP S538063 A JPS538063 A JP S538063A
Authority
JP
Japan
Prior art keywords
illuminance
controlling apparatus
light source
light
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8197276A
Other languages
Japanese (ja)
Inventor
Kiyoshi Nakagawa
Ryuichi Kyomasu
Keizo Nomura
Shuji Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8197276A priority Critical patent/JPS538063A/en
Publication of JPS538063A publication Critical patent/JPS538063A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Exposure In Printing And Copying (AREA)

Abstract

PURPOSE: To automatically regulate the illuminance of a baking apparatus used in semiconductor production process by transmitting the light from a light source through an optical fiber, converting the light intensity to an electric signal with a photoelectric transducer then comparing said signal with a reference signal thereby controlling the illuminance of the light source.
COPYRIGHT: (C)1978,JPO&Japio
JP8197276A 1976-07-12 1976-07-12 Illuminance controlling apparatus Pending JPS538063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8197276A JPS538063A (en) 1976-07-12 1976-07-12 Illuminance controlling apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8197276A JPS538063A (en) 1976-07-12 1976-07-12 Illuminance controlling apparatus

Publications (1)

Publication Number Publication Date
JPS538063A true JPS538063A (en) 1978-01-25

Family

ID=13761398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8197276A Pending JPS538063A (en) 1976-07-12 1976-07-12 Illuminance controlling apparatus

Country Status (1)

Country Link
JP (1) JPS538063A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6296994U (en) * 1985-12-03 1987-06-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6296994U (en) * 1985-12-03 1987-06-20
JPH0320073Y2 (en) * 1985-12-03 1991-04-30

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