JPS538063A - Illuminance controlling apparatus - Google Patents
Illuminance controlling apparatusInfo
- Publication number
- JPS538063A JPS538063A JP8197276A JP8197276A JPS538063A JP S538063 A JPS538063 A JP S538063A JP 8197276 A JP8197276 A JP 8197276A JP 8197276 A JP8197276 A JP 8197276A JP S538063 A JPS538063 A JP S538063A
- Authority
- JP
- Japan
- Prior art keywords
- illuminance
- controlling apparatus
- light source
- light
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Exposure In Printing And Copying (AREA)
Abstract
PURPOSE: To automatically regulate the illuminance of a baking apparatus used in semiconductor production process by transmitting the light from a light source through an optical fiber, converting the light intensity to an electric signal with a photoelectric transducer then comparing said signal with a reference signal thereby controlling the illuminance of the light source.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8197276A JPS538063A (en) | 1976-07-12 | 1976-07-12 | Illuminance controlling apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8197276A JPS538063A (en) | 1976-07-12 | 1976-07-12 | Illuminance controlling apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS538063A true JPS538063A (en) | 1978-01-25 |
Family
ID=13761398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8197276A Pending JPS538063A (en) | 1976-07-12 | 1976-07-12 | Illuminance controlling apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS538063A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6296994U (en) * | 1985-12-03 | 1987-06-20 |
-
1976
- 1976-07-12 JP JP8197276A patent/JPS538063A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6296994U (en) * | 1985-12-03 | 1987-06-20 | ||
JPH0320073Y2 (en) * | 1985-12-03 | 1991-04-30 |
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