JPS538058Y2 - - Google Patents

Info

Publication number
JPS538058Y2
JPS538058Y2 JP9514173U JP9514173U JPS538058Y2 JP S538058 Y2 JPS538058 Y2 JP S538058Y2 JP 9514173 U JP9514173 U JP 9514173U JP 9514173 U JP9514173 U JP 9514173U JP S538058 Y2 JPS538058 Y2 JP S538058Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9514173U
Other languages
Japanese (ja)
Other versions
JPS5040852U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9514173U priority Critical patent/JPS538058Y2/ja
Publication of JPS5040852U publication Critical patent/JPS5040852U/ja
Application granted granted Critical
Publication of JPS538058Y2 publication Critical patent/JPS538058Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9514173U 1973-08-13 1973-08-13 Expired JPS538058Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9514173U JPS538058Y2 (enrdf_load_stackoverflow) 1973-08-13 1973-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9514173U JPS538058Y2 (enrdf_load_stackoverflow) 1973-08-13 1973-08-13

Publications (2)

Publication Number Publication Date
JPS5040852U JPS5040852U (enrdf_load_stackoverflow) 1975-04-25
JPS538058Y2 true JPS538058Y2 (enrdf_load_stackoverflow) 1978-03-01

Family

ID=28290644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9514173U Expired JPS538058Y2 (enrdf_load_stackoverflow) 1973-08-13 1973-08-13

Country Status (1)

Country Link
JP (1) JPS538058Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6436922U (enrdf_load_stackoverflow) * 1987-08-29 1989-03-06

Also Published As

Publication number Publication date
JPS5040852U (enrdf_load_stackoverflow) 1975-04-25

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