JPS5377672U - - Google Patents
Info
- Publication number
- JPS5377672U JPS5377672U JP15911576U JP15911576U JPS5377672U JP S5377672 U JPS5377672 U JP S5377672U JP 15911576 U JP15911576 U JP 15911576U JP 15911576 U JP15911576 U JP 15911576U JP S5377672 U JPS5377672 U JP S5377672U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976159115U JPS5647946Y2 (ja�@�@) | 1976-11-26 | 1976-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976159115U JPS5647946Y2 (ja�@�@) | 1976-11-26 | 1976-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5377672U true JPS5377672U (ja�@�@) | 1978-06-28 |
| JPS5647946Y2 JPS5647946Y2 (ja�@�@) | 1981-11-10 |
Family
ID=28767071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976159115U Expired JPS5647946Y2 (ja�@�@) | 1976-11-26 | 1976-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5647946Y2 (ja�@�@) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4888871A (ja�@�@) * | 1972-02-02 | 1973-11-21 |
-
1976
- 1976-11-26 JP JP1976159115U patent/JPS5647946Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4888871A (ja�@�@) * | 1972-02-02 | 1973-11-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5647946Y2 (ja�@�@) | 1981-11-10 |