JPS5377670U - - Google Patents
Info
- Publication number
- JPS5377670U JPS5377670U JP15998776U JP15998776U JPS5377670U JP S5377670 U JPS5377670 U JP S5377670U JP 15998776 U JP15998776 U JP 15998776U JP 15998776 U JP15998776 U JP 15998776U JP S5377670 U JPS5377670 U JP S5377670U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15998776U JPS5377670U (en:Method) | 1976-11-29 | 1976-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15998776U JPS5377670U (en:Method) | 1976-11-29 | 1976-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5377670U true JPS5377670U (en:Method) | 1978-06-28 |
Family
ID=28767889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15998776U Pending JPS5377670U (en:Method) | 1976-11-29 | 1976-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5377670U (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3474021A (en) * | 1966-01-12 | 1969-10-21 | Ibm | Method of forming openings using sequential sputtering and chemical etching |
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1976
- 1976-11-29 JP JP15998776U patent/JPS5377670U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3474021A (en) * | 1966-01-12 | 1969-10-21 | Ibm | Method of forming openings using sequential sputtering and chemical etching |