JPS5376941U - - Google Patents

Info

Publication number
JPS5376941U
JPS5376941U JP16034076U JP16034076U JPS5376941U JP S5376941 U JPS5376941 U JP S5376941U JP 16034076 U JP16034076 U JP 16034076U JP 16034076 U JP16034076 U JP 16034076U JP S5376941 U JPS5376941 U JP S5376941U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16034076U
Other languages
Japanese (ja)
Other versions
JPS5545369Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976160340U priority Critical patent/JPS5545369Y2/ja
Publication of JPS5376941U publication Critical patent/JPS5376941U/ja
Application granted granted Critical
Publication of JPS5545369Y2 publication Critical patent/JPS5545369Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1976160340U 1976-11-30 1976-11-30 Expired JPS5545369Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976160340U JPS5545369Y2 (cs) 1976-11-30 1976-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976160340U JPS5545369Y2 (cs) 1976-11-30 1976-11-30

Publications (2)

Publication Number Publication Date
JPS5376941U true JPS5376941U (cs) 1978-06-27
JPS5545369Y2 JPS5545369Y2 (cs) 1980-10-24

Family

ID=28768228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976160340U Expired JPS5545369Y2 (cs) 1976-11-30 1976-11-30

Country Status (1)

Country Link
JP (1) JPS5545369Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902615A (en) * 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902615A (en) * 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system

Also Published As

Publication number Publication date
JPS5545369Y2 (cs) 1980-10-24

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