JPS5376559U - - Google Patents
Info
- Publication number
- JPS5376559U JPS5376559U JP1976160757U JP16075776U JPS5376559U JP S5376559 U JPS5376559 U JP S5376559U JP 1976160757 U JP1976160757 U JP 1976160757U JP 16075776 U JP16075776 U JP 16075776U JP S5376559 U JPS5376559 U JP S5376559U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Air-Flow Control Members (AREA)
- Air Filters, Heat-Exchange Apparatuses, And Housings Of Air-Conditioning Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976160757U JPS5647471Y2 (en:Method) | 1976-11-30 | 1976-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976160757U JPS5647471Y2 (en:Method) | 1976-11-30 | 1976-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5376559U true JPS5376559U (en:Method) | 1978-06-26 |
| JPS5647471Y2 JPS5647471Y2 (en:Method) | 1981-11-06 |
Family
ID=28768614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976160757U Expired JPS5647471Y2 (en:Method) | 1976-11-30 | 1976-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5647471Y2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666744U (en:Method) * | 1979-10-29 | 1981-06-03 | ||
| US7416370B2 (en) | 2005-06-15 | 2008-08-26 | Lam Research Corporation | Method and apparatus for transporting a substrate using non-Newtonian fluid |
| US7441299B2 (en) | 2003-12-23 | 2008-10-28 | Lam Research Corporation | Apparatuses and methods for cleaning a substrate |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS452610Y1 (en:Method) * | 1967-09-08 | 1970-02-03 | ||
| JPS4949641U (en:Method) * | 1972-08-04 | 1974-05-01 |
-
1976
- 1976-11-30 JP JP1976160757U patent/JPS5647471Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS452610Y1 (en:Method) * | 1967-09-08 | 1970-02-03 | ||
| JPS4949641U (en:Method) * | 1972-08-04 | 1974-05-01 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5666744U (en:Method) * | 1979-10-29 | 1981-06-03 | ||
| US7441299B2 (en) | 2003-12-23 | 2008-10-28 | Lam Research Corporation | Apparatuses and methods for cleaning a substrate |
| US7416370B2 (en) | 2005-06-15 | 2008-08-26 | Lam Research Corporation | Method and apparatus for transporting a substrate using non-Newtonian fluid |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5647471Y2 (en:Method) | 1981-11-06 |